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Fully Automatic
UV Irradiator
FMUV series
UV Irradiator
FMUV series
Description：
- The Fully Automatic UV Irradiator Model TTS EXR-FMUV series handles mounted wafer and Frame . The UV Irradiation is a controlled accurate UV sensor to irradiate secured and accurate UV irradiation. In-Line UV sensor measures one by one real time UV Intensity level to secure the required UV intensity and power control TTS EXR- FMUV series are New Generation of the Fully Automatic UV Irradiator. New features are as follows.
- New concept design ; mechanical finger achieves smooth and safer operation.
- H.D.C.R(Highly Digital Control Recipe) Availlable
- Original design provides Electro Static free wafer holding.
- Easy intensity calibration and power setting.
- Perfect safety features by using fail safe the Photo screen ＆ cover inter-locking system .
- TTS Unique Inline technology and Loger UV Lamp Life Time.
- Quick conversion kit for different wafer size and frame availlable.
- The wide LCD color touch panel leads operators easy operation.